Laser Polarimetric Imaging of Surface Defects of Semiconductor Wafers, Microelectronics, and Spacecraft Structures

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dc.contributor.authorGiakos, George C.
dc.contributor.authorMedithe, A.
dc.contributor.authorSumrain, S.
dc.contributor.authorSukumar, S.
dc.contributor.authorFraiwan, Luay
dc.contributor.authorOrozco, A.
dc.date.accessioned2018-03-20T11:32:14Z
dc.date.accessioned2023-08-19T08:39:40Z
dc.date.available2018-03-20T11:32:14Z
dc.date.available2023-08-19T08:39:40Z
dc.date.issued2006-11-20
dc.descriptionGiakos, G. C., Medithe, A., Sumrain, S., Sukumar, S., Fraiwan, L., & Orozco, A. (2006). Laser polarimetric imaging of surface defects of semiconductor wafers, microelectronics, and spacecraft structures. IEEE transactions on instrumentation and measurement, 55(6), 2126-2131.
dc.description.abstractThe purpose of this paper is to present novel optical imaging techniques, based on all active optical polarimetric principles, for efficient detection, inspection, and monitoring of semiconductor components, microelectronic components, and spacecraft structures. The experimental results of this paper indicate that the polarimetric imaging techniques are highly efficient in detecting defects on the semiconductor structures when compared to nonpolarimetric techniquesen_US
dc.identifier.citationGiakos, G. C., Medithe, A., Sumrain, S., Sukumar, S., Fraiwan, L., & Orozco, A. (2006). Laser polarimetric imaging of surface defects of semiconductor wafers, microelectronics, and spacecraft structures. IEEE transactions on instrumentation and measurement, 55(6), 2126-2131.
dc.identifier.doihttps://doi.org/10.1109/TIM.2006.884110
dc.identifier.urihttps://edms.wexl.in/handle/1/767
dc.language.isoenen_US
dc.publisherIEEEen_US
dc.subjectMicroelectronicsen_US
dc.subjectDegree of Linear Polarizationen_US
dc.subjectEnhanced Image Contrasten_US
dc.subjectPolymersen_US
dc.subjectSpacecraft Structures Inspectionen_US
dc.subjectStokes Parametersen_US
dc.titleLaser Polarimetric Imaging of Surface Defects of Semiconductor Wafers, Microelectronics, and Spacecraft Structuresen_US
dc.typeArticleen_US

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