Flexible temperature sensor fabrication using photolithography technique

Abstract

With the ever-evolving demand for highly compact instruments, development in miniaturized products has been one of the major highlights in the technological research for the past century. A renowned example is the predictions given by Moore’s law, pertaining to the proliferation in the numbers of transistors within electronic equipment’s with time. Such devices found interest in several applications including industrial usages and biomedical fields, such as health diagnosis and therapies. Recent advances in electronic devices is related to its contact compatibility with non-planar surfaces, which are, otherwise, hard to scan with rigid devices. Such advancements were facilitated by the new developments in the electronic device’s flexibility. In the current work, the fabrication of flexible sensor is provided in this paper, where a Nickel pattern along a polyimide substrate is used as a resistive based temperature indicator. One of the advantages of such sensors is its adaptability to various surface configurations, such as cylindrical tubes. Such sensor can play a crucial role in detailed examination of adverse flow condition, such as in phase change application, which can be achieved by its instantaneous measurement at multipoint resolution and conformity to non-planar surfaces